The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2026
Filed:
May. 18, 2023
Applied Materials, Inc., Santa Clara, CA (US);
Anantha K. Subramani, San Jose, CA (US);
Seyyed Abdolreza Fazeli, Santa Clara, CA (US);
Yang Guo, San Mateo, CA (US);
Chandrashekara Baginagere, Bangalore, IN;
Ramcharan Sundar, Bangalore, IN;
Steven Mosbrucker, Sunnyvale, CA (US);
John Lee, Sunnyvale, CA (US);
Yiyang Wan, Sunnyvale, CA (US);
Shumao Zhang, San Jose, CA (US);
Dhritiman Subha Kashyap, Bangalore, IN;
Azhar Ali M.A, Bangalore, IN;
Applied Materials Inc., Santa Clara, CA (US);
Abstract
In some embodiments, a showerhead assembly includes a heated showerhead having a heater plate and a gas distribution plate coupled together; an ion filter spaced from the heated showerhead; a spacer ring in contact between the heated showerhead and the ion filter; a remote plasma region between the heated showerhead and the ion filter; an upper isolator spaced from the spacer ring and supported on the ion filter; a sealing ring fastened to the heated showerhead sealing against the upper isolator and pushing the upper isolator against the ion filter; a gap between a bottom of the gas distribution plate and a top of the ion filter, the gap being in fluid communication with the remote plasma region; a first passage extending through the heater plate; and a second passage in communication with the first passage and extending through the gas distribution plate, the second passage extending to the gap.