The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 26, 2026

Filed:

Apr. 27, 2022
Applicant:

Intel Corporation, Santa Clara, CA (US);

Inventors:

Patrick Morrow, Portland, OR (US);

Mauro J. Kobrinsky, Portland, OR (US);

Rishabh Mehandru, Portland, OR (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 23/535 (2006.01); H10D 30/01 (2025.01); H10D 30/60 (2025.01); H10D 30/62 (2025.01); H10D 30/66 (2025.01); H10D 84/01 (2025.01); H10D 84/03 (2025.01); H10D 84/83 (2025.01); H10W 20/00 (2026.01); H10W 20/20 (2026.01);
U.S. Cl.
CPC ...
H10W 20/076 (2026.01); H10D 30/024 (2025.01); H10D 30/60 (2025.01); H10D 30/62 (2025.01); H10D 30/6211 (2025.01); H10D 84/0158 (2025.01); H10D 84/038 (2025.01); H10D 84/834 (2025.01); H10W 20/069 (2026.01); H10W 20/0698 (2026.01); H10W 20/083 (2026.01); H10W 20/20 (2026.01); H10D 30/663 (2025.01); H10D 84/0147 (2025.01); H10D 84/0149 (2025.01); H10W 20/023 (2026.01);
Abstract

A transistor cell including a deep via that is at least partially lined with a dielectric material. The deep via may extend down to a substrate over which the transistor is disposed. The deep via may be directly connected to a terminal of the transistor, such as the source or drain, to interconnect the transistor with an interconnect metallization level disposed in the substrate under the transistor, or on at opposite side of the substrate as the transistor. Parasitic capacitance associated with the close proximity of the deep via metallization to one or more terminals of the transistor may be reduced by lining at least a portion of the deep via sidewall with dielectric material, partially necking the deep via metallization in a region adjacent to the transistor.


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