The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2026
Filed:
Jun. 14, 2022
Tokyo Electron Limited, Tokyo, JP;
Takanori Obaru, Koshi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A substrate liquid processing apparatus includes a substrate holder configured to hold a substrate; a rotational driver configured to rotate the substrate; a liquid discharger having a liquid supply nozzle configured to discharge a liquid toward a processing surface of the substrate; a processing liquid discharger having a processing liquid supply nozzle configured to discharge a processing liquid in a form of mist toward the processing surface; a first driver configured to move the processing liquid supply nozzle; and a controller. The controller controls the processing liquid discharger and the first driver to allow a landing position of the processing liquid on the processing surface on which a liquid film containing the liquid is formed to be moved from an outer peripheral portion of the processing surface toward a central portion thereof while controlling the liquid discharger to discharge the liquid toward the processing surface of the substrate.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile