The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2026
Filed:
May. 13, 2022
Tokyo Electron Limited, Tokyo, JP;
Daishiro Akiyama, Albany, NY (US);
Yusuke Ogawa, Hokkaido, JP;
Tsuyoshi Mizuuchi, Hokkaido, JP;
Takahiko Kato, Miyagi, JP;
Tomoki Komatsu, Tokyo, JP;
Kosuke Nakago, Tokyo, JP;
Yuhei Otomo, Tokyo, JP;
Kohji Liu, Tokyo, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
An evaluation apparatus includes a processor that performs operations including reading a simulation parameter of a topography simulator and first range information or second range information that are associated with each other, the simulation parameter being calculated to cause the topography simulator output topography information of a processed target object that is to be obtained by processing the unprocessed target object under a predetermined processing condition, providing topography information of a new unprocessed target object and the simulation parameter to the topography simulator to cause the topography simulator to predict topography information of a new processed target object that is processed under the predetermined processing condition, and outputting a result of comparing the topography information of the new unprocessed target object with the first range information or a result of comparing the topography information of the new processed target object with the second range information.