The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2026
Filed:
Jul. 12, 2022
Siltronic Ag, Munich, DE;
SILTRONIC AG, Munich, DE;
Abstract
A β-GaOlayer is grown on a substrate by: performing a first deposition cycle at a first growth rate using oxygen and a precursor including Ga, the first deposition cycle having a thickness of at least 3 atomic layers of β-GaOand at most 20 atomic layers of β-GaO; determining a regression curve for a layer surface reflectivity using tuples of a measured first layer surface reflectivity and having a first layer thickness; and performing a second deposition cycle including measuring a second layer thickness and a second layer surface reflectivity, with a predetermined second growth rate determined from the first growth rate multiplied by a correction factor, having a defined lower and upper limit.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile