The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2026
Filed:
Jan. 26, 2024
Tokyo Electron Limited, Tokyo, JP;
Akira Nagayama, Miyagi, JP;
Atsushi Kawabata, Miyagi, JP;
Masato Takayama, Miyagi, JP;
Koji Kawanishi, Miyagi, JP;
Takeshi Akao, Miyagi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
The present disclosure provides a substrate support. The substrate support comprises: a base; a first dielectric portion, disposed on the base, having a substrate support portion on which a substrate is mounted; and a second dielectric portion, disposed around the first dielectric portion, having an edge ring support portion on which an edge ring is mounted, wherein at least one of the first dielectric portion and the second dielectric portion includes a sprayed layer formed of an insulating material.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile