The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2026
Filed:
Jan. 13, 2023
Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;
Chansyun David Yang, Hsinchu, TW;
Ding-Kang Shih, New Taipei, TW;
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu, TW;
Abstract
A method for manufacturing a semiconductor structure is provided. The method may include several operations. A substrate is provided, received or formed, wherein the substrate includes an epitaxial structure in a fin structure of the substrate and a metal gate structure over the fin structure. An insulating layer covering the metal gate structure is formed. A semiconductive material layer is formed over the epitaxial structure and the insulating layer, wherein a first portion of the semiconductive material layer over the epitaxial structure comprises crystalline semiconductive material, and a second portion of the semiconductive material layer over the insulating layer comprises amorphous semiconductive material. The second portion of the semiconductive material layer is removed. A semiconductor structure thereof is also provided.