The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 12, 2026

Filed:

Dec. 06, 2021
Applicant:

Japan Electronic Materials Corporation, Hyogo, JP;

Inventor:

Chikaomi Mori, Hyogo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 1/073 (2006.01); G01R 1/067 (2006.01);
U.S. Cl.
CPC ...
G01R 1/07357 (2013.01); G01R 1/06716 (2013.01); G01R 1/07342 (2013.01);
Abstract

[Problem] The objective is to provide a probe card that are less prone to contact failure, with good high-frequency characteristics, current endurance, and good conductivity. [Solution] A probe card includes a wiring boardformed with one or more probe electrodes, an upper guide platespaced below the wiring boardand facing the wiring board, formed with one or more upper guide holes, a lower guide platespaced below the upper guide plateand facing the upper guide plate, formed with one or more lower guide holes, and a probe groupG including two or more probesthat are inserted through a same upper guide holeand a same lower guide holeand connected to a same probe electrodeand a same electrodeof an object to be inspected, wherein the probesof the probe groupG are capable of independently each other buckling deformation between the upper guide plateand the lower guide plate, and their lower ends are capable of moving independently each other in a vertical direction.


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