The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2026
Filed:
Sep. 26, 2022
Changxin Memory Technologies, Inc., Hefei City, CN;
Yi Jiang, Hefei City, CN;
Deyuan Xiao, Hefei City, CN;
Qinghua Han, Hefei City, CN;
Meng-Feng Tsai, Hefei City, CN;
CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei City, CN;
Abstract
A test structure includes a plurality of word lines and a plurality of bit lines. A vertical gate-all-around (VGAA) transistor is formed at the intersection of each word line and each bit line. The test structure includes a first area and a second area. The second area is arranged outside the first area, the word lines in the first area and the word lines in the second area are disconnected, and the bit lines in the first area and the bit lines in the second area are disconnected. The plurality of VGAA transistors located in the first area form a test array, and a VGAA transistor located in the middle of the test array is a device to be tested.