The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2026
Filed:
Jan. 17, 2024
Asml Netherlands B.v., Veldhoven, NL;
Jasper Winters, Nieuw Vennep, NL;
Erwin John Van Zwet, Pijnacker, NL;
Marcus Johannes Van Der Lans, Hillegom, NL;
Pieter Willem Herman De Jager, Middelbeers, NL;
Emiel Anton Van De Ven, Delft, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Systems and methods are disclosed for stabilizing an optical column. One system can include an optical column; a frame configured to support the optical column, the frame having a first coefficient of thermal expansion (CTE); and a subframe configured to be coupled to the optical column in at least two places by a first anchor and a second anchor to stabilize the optical column against a displacement or a rotation caused by thermal expansion in the frame or the optical column, the subframe having a second CTE lower than the first CTE.