The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2026
Filed:
Dec. 15, 2021
Asml Netherlands B.v., Veldhoven, NL;
Mustafa Ümit Arabul, Eindhoven, NL;
Zili Zhou, Veldhoven, NL;
Willem Marie Julia Marcel Coene, Veldhoven, NL;
Coen Adrianus Verschuren, Eindhoven, NL;
Paul Louis Maria Joseph Van Neer, Bergschenhoek, NL;
Daniele Piras, Amsterdam, NL;
Sandra Blaak, Zwijndrecht, NL;
Wouter Dick Koek, Zoetermeer, NL;
Robert Wilhelm Willekers, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A metrology apparatus for determining one or more parameters of a structure fabricated in or on a semiconductor substrate. The apparatus comprises a transducer array comprising a plurality of transducers positioned in a plane. The plurality of transducers comprises at least one transmitter transducer for emitting acoustic radiation in a frequency range from 1 GHz to 100 GHz towards the structure, and at least one receiver transducer for receiving acoustic radiation reflected and/or diffracted from the structure.