The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2026
Filed:
Dec. 02, 2022
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Tatsuo Hatano, Yamanashi, JP;
Naoki Watanabe, Yamanashi, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); C23C 14/35 (2006.01); C23C 14/50 (2006.01); H01J 37/32 (2006.01); H01J 37/34 (2006.01); H10P 14/20 (2026.01); H10P 14/22 (2026.01); H10P 72/72 (2026.01); H10P 72/76 (2026.01); H01L 21/02 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3428 (2013.01); C23C 14/35 (2013.01); C23C 14/505 (2013.01); H01J 37/3244 (2013.01); H01J 37/32724 (2013.01); H01J 37/3426 (2013.01); H10P 14/22 (2026.01); H10P 14/3216 (2026.01); H10P 14/3416 (2026.01); H10P 72/72 (2026.01); H10P 72/7618 (2026.01); H01J 2237/002 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/20214 (2013.01); H01J 2237/332 (2013.01);
Abstract
A substrate processing apparatus includes: a tray provided in a vacuum processing container and having a recess that accommodates a target made of a low-melting-point material; a refrigerator that cools the tray; a substrate holder that holds a substrate; a reversal driver that reverses the position of the substrate holder upside down; and a rotation driver that rotates the substrate holder in a circumferential direction of the substrate.