The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2026
Filed:
Jun. 11, 2024
United Microelectronics Corp., Hsin-Chu City, TW;
UNITED MICROELECTRONICS CORP., Hsin-Chu City, TW;
Abstract
A method for forming a semiconductor memory device is disclosed. A substrate is provided. A pair of floating gates are formed on the substrate. A recessed region is formed in the substrate between the floating gates, wherein an upper surface of the recessed region has a concave profile lower than a surface of the substrate and with a radius between 40 nm and 60 nm in a cross-sectional view perpendicular to the floating gates. A source line doped region is formed in the recessed region. An erase gate is formed between the floating gates and on the recessed region, and a word line is formed on the substrate and adjacent to a side of each of the floating gates opposite to the erase gate. A bit line doped region is formed in the substrate and adjacent to the word line.