The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2026
Filed:
Jul. 07, 2020
Ebara Corporation, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
Provided is a substrate holder for plating on a surface of a substrate, provided with an electrical contact that is easy to replace. A substrate holder 1 includes: a first holding membera second holding memberthat has an opening portionfor exposing the surface of a substrate W and holds the substrate W in a sandwiched manner with the first holding membera plurality of engaging shaft portionseach having a head portionin an expanded head shape at a tip end portion, provided in a circumferential direction of the second holding memberand an electrical contacthaving a contact portionto be in contact with an edge portion of the substrate W, and having an engagement reception portionin a notch shape to be engaged with the adjacent engaging shaft portionfor arrangement along a circumference of the opening portionof the second holding member