The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2026
Filed:
Mar. 10, 2023
Asm Ip Holding B.v., Almere, NL;
Yasiel Cabrera, Phoenix, AZ (US);
Youngchol Byun, Tempe, AZ (US);
Arul Vigneswar Ravichandran, Tempe, AZ (US);
Salvatore Luiso, Tempe, AZ (US);
Sang Ho Yu, Cupertino, CA (US);
Moataz Bellah Mousa, Chandler, AZ (US);
ASM IP Holding B.V., Almere, NL;
Abstract
Methods and systems for forming a structure are disclosed. Exemplary methods include providing a substrate comprising a gap within a reaction chamber, selectively depositing a first material comprising molybdenum on a first surface within the gap relative to a second surface within the gap to at least partially fill the gap, and after the step of selectively depositing the first material comprising molybdenum, conformally depositing a second material comprising molybdenum over the first surface and the second surface.