Fan-out stacked semiconductor package structure and packaging method thereof

Abstract

A fan-out stacked semiconductor package structure and a packaging method thereof are disclosed. The structure includes a three-dimensional memory chip package unit and a two-dimensional fan-out peripheral circuit chip SiP package unit. The three-dimensional memory chip package unit includes: at least two memory chips laminated in a stepped configuration; a first rewiring layer; wire bonding structures, each of which being electrically connected to the bonding pad and the first rewiring layer; a first encapsulating layer; and first metal bumps, formed on the first rewiring layer. The two-dimensional fan-out peripheral circuit chip SiP package unit includes: a second rewiring layer; at least one peripheral circuit chip; a third rewiring layer, bonded to the peripheral circuit chip; metal connection pillars; a second encapsulating layer, encapsulating the peripheral circuit chip and the metal connection pillars; and second metal bumps, formed on the second rewiring layer. The first metal bumps are bonded to the third rewiring layer.