The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2026
Filed:
Jun. 20, 2022
Asml Netherlands B.v., Veldhoven, NL;
Albertus Hartgers, Berkel-Enschot, NL;
Marco Matheus Louis Steeghs, Sevenum, NL;
Gerardus Hubertus Petrus Maria Swinkels, Eindhoven, NL;
Giovanni Imponente, Eindhoven, NL;
Nicholas William Maria Plantz, Tilburg, NL;
Wouter Joep Engelen, Eindhoven, NL;
Marcus Adrianus Van De Kerkhof, Helmond, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A plate for use in an imaging system to determine at least two optical properties of an illumination beam of the imaging system, the imaging system configured to illuminate an illumination region with the illumination beam, the plate including a plurality of markers, wherein a first subset of the plurality of markers includes a first type of markers for determining a first optical property of the illumination beam, and a second subset of the plurality of markers includes a second type of markers for determining a second optical property of the illumination beam, wherein the plurality of markers are located within a marker region of the plate and the marker region generally corresponds to the illumination region.