The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 21, 2026

Filed:

Mar. 03, 2021
Applicant:

Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;

Inventors:

Chien-Hung Lai, Taichung City, TW;

Hao-Ming Chang, Pingtung City, TW;

Hsuan-Wen Wang, Kaohsiung City, TW;

Ching-Ting Yang, Tainan City, TW;

Cheng-Kuang Chen, Hsinchu, TW;

Chien-Chao Huang, Hsinchu, TW;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 1/84 (2012.01); G03F 1/70 (2012.01); G03F 1/76 (2012.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G03F 1/84 (2013.01); G03F 1/70 (2013.01); G03F 1/76 (2013.01); G03F 7/7065 (2013.01);
Abstract

The present disclosure provides a photomask, including a plurality of pattern areas, each of the pattern areas is defined by a respective boundary, a first pattern area including a first mask feature, and a training area adjacent to a boundary of the pattern area, the training area comprising a first training feature, wherein the first training feature is comparable to the first mask feature.


Find Patent Forward Citations

Quick Actions:

Lai, Chien-Hung. (2026). Photomask and method for inspecting photomask (U.S. Patent No. 12607927). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12607927

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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