The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2026
Filed:
Aug. 02, 2023
Applicant:
Disco Corporation, Tokyo, JP;
Inventors:
Junsoo Woo, Tokyo, JP;
Tomotaka Tabuchi, Tokyo, JP;
Assignee:
DISCO CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 7/22 (2006.01); B23Q 3/08 (2006.01); B24B 41/06 (2012.01); B25B 11/00 (2006.01); H01L 21/683 (2006.01); H10P 72/78 (2026.01);
U.S. Cl.
CPC ...
B24B 7/228 (2013.01); B23Q 3/088 (2013.01); B24B 41/068 (2013.01); B25B 11/005 (2013.01); H10P 72/78 (2026.01);
Abstract
A chuck table manufacturing method capable of changing over the shape of a holding surface according to at least two workpieces different in area or shape includes a porous plate sticking step of sticking a frame body and a porous plate to each other while the porous plate is accommodated in a recess of the frame body with an upper surface of the porous plate being exposed, a groove forming step of forming, in the porous plate, a groove reaching a bottom surface of the recess, and a resin filling step of filling the groove with a liquid resin and curing the liquid resin.