The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2026
Filed:
Jun. 28, 2022
Ebara Corporation, Tokyo, JP;
Shuichi Suemasa, Tokyo, JP;
Mitsuru Miyazaki, Tokyo, JP;
Shozo Takahashi, Tokyo, JP;
Takuya Inoue, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
A substrate cleaning device () includes a roll cleaning member () and a rotation holding portion (). The rotation holding portion () includes a non-contact sealing portion () that is disposed between a bearing portion () and the roll cleaning member () to seal a gap between a shaft portion () and a housing portion (). The non-contact sealing portion () includes a rotating portion () that is attached to the shaft portion () and has a plurality of protrusion portions () formed on a peripheral surface () of the rotating portion () at intervals in an axial direction, and a fixed portion () that is attached to the housing portion (), surrounds the plurality of protrusion portions (), and has a gas supply hole () formed in an inner peripheral surface () of the fixed portion () surrounding the plurality of protrusion portions (), the gas supply hole () supplying a compressed gas () from a position inward of the protrusion portions () in the axial direction, which are disposed at both end portions in the axial direction, among the plurality of protrusion portions ().