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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12589465 B1

PDFFull Text
Date of Patent:
Mar. 31, 2026

Filed:

Jul. 12, 2024

Platen rotation device

Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Bruce Cho, Hsinchu, TW;

Chia-Ying Tien, Hsinchu, TW;

Huang-Chu Ko, Hsinchu, TW;

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;

Attorney:

Hauptman Ham, LLP

Primary Examiner:

Sylvia Macarthur

Int. Cl.
CPC ...
B24B 47/12 (2006.01); B24B 1/00 (2006.01); B24B 37/005 (2012.01); B24B 37/04 (2012.01); B24B 37/10 (2012.01); H01L 21/306 (2006.01); H01L 21/321 (2006.01); H02P 29/00 (2016.01);
U.S. Cl.
CPC ...
B24B 47/12 (2013.01); B24B 1/00 (2013.01); B24B 37/005 (2013.01); B24B 37/044 (2013.01); B24B 37/10 (2013.01); H01L 21/30625 (2013.01); H01L 21/3212 (2013.01); H02P 29/00 (2013.01);
Abstract

A method includes controlling a rotational kinetic energy of a rotor assembly of a wafer-platen, wherein a rotational velocity of the wafer-platen is either increased or decreased. The method further includes generating an electrical energy output of the wafer-platen based on decreased rotational kinetic energy of the wafer-platen. The method further includes storing the electrical energy output by the rotator assembly based on the decreased rotational kinetic energy of the wafer-platen.

Find Patent Forward Citations

Cho, Bruce. (2026). Platen rotation device (U.S. Patent No. 12589465). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12589465

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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