Multi-port sram cell with metal interconnect structures

Abstract

A memory cell includes a device layer including a plurality of transistors and an interconnect structure disposed over the device layer. Each of the transistors includes a gate structure extending lengthwise in a first direction. The interconnect structure includes a bottommost metal line layer electrically coupled to the transistors in the device layer. The bottommost metal line layer includes metal lines arranged in first, second, third, fourth, fifth, and sixth metal tracks in order from first to sixth along the first direction. A distance between any adjacent two of the first, second, third, fourth, fifth, and six metal tracks measured along the first direction is uniform. The first metal track includes a metal line electrically coupled to an electric ground of the memory cell. The sixth metal track includes a metal line electrically coupled to a power supply of the memory cell.