The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2026
Filed:
Sep. 12, 2023
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Michael Patra, Oberkochen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
An illumination optical unit serves for use in a lithographic projection exposure apparatus. The illumination optical unit serves to guide illumination light from a light source toward an object field. A structured object is arranged in the object field. The illumination optical unit is embodied such that the object field illuminated by the illumination optical unit has a field extent along a first field coordinate and a field extent, shorter in comparison, along a second field coordinate perpendicular thereto. The illumination optical unit is embodied such that the illumination light which impinges on the object field is polarized in a polarization direction that extends parallel to the shorter field extent along the second field coordinate. This yields an illumination optical unit which, firstly, can offer a high structure resolution and, secondly, can impose manageable properties on the optical design.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile