The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2026
Filed:
Apr. 28, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Shawn Joseph Bonham, Mesa, AZ (US);
Xinning Luan, Tempe, AZ (US);
Hui Chen, Tempe, AZ (US);
James M. Amos, Apache Junction, AZ (US);
John Newman, Chandler, AZ (US);
Kirk Allen Fisher, Tempe, AZ (US);
Aimee S. Erhardt, Tempe, AZ (US);
Philip Michael Amos, Apache Junction, AZ (US);
Zhiyuan Ye, San Jose, CA (US);
Shu-Kwan Lau, Sunnyvale, CA (US);
Lori D. Washington, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Systems and apparatus for a reduced mass substrate support are disclosed, according to certain embodiments. A front side pocket is provided for support of a substrate, while a backside pocket is provided that reduces the mass of the substrate support. By providing the backside pocket, the mass of the overall substrate support is reduced, providing faster thermal cycling times for the substrate support and reducing the weight of the substrate support for transport. Lift pin systems, according to disclosed embodiments, are compatible with existing pedestal systems by providing a hollow extension from each lift pin hole that extends from a bottom of the backside pocket to provide support for lift pin insertion and operation.