The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2026
Filed:
Jun. 02, 2022
Tokyo Electron Limited, Tokyo, JP;
Takuya Kawaguchi, Yamanashi, JP;
Takanobu Hotta, Yamanashi, JP;
Kensaku Narushima, Yamanashi, JP;
Hideaki Yamasaki, Yamanashi, JP;
Takashi Kakegawa, Yamanashi, JP;
Toshio Takagi, Yamanashi, JP;
Takaya Yamauchi, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A showerhead includes a shower plate and a base member including a gas flow path, the base member fixing the shower plate. The showerhead includes gas supply members disposed at a gas diffusion space, the gas diffusion space being provided between the shower plate and the base member, the gas supply members being connected to the gas flow path, each of the gas supply members including outlets via which gas is radially discharged, and the gas supply members being arranged such that the gas discharged via the outlets of the gas supply members generates a rotational flow.