The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2026
Filed:
Apr. 28, 2023
Samsung Display Co., Ltd., Yongin-si, KR;
Tes Co., Ltd, Yongin-si, KR;
Ltc Co., Ltd, Hwaseong-si, KR;
Gugrae Jo, Yongin-si, KR;
Hyoungsik Kim, Yongin-si, KR;
Woojin Cho, Yongin-si, KR;
Jongsoon Lee, Hwaseong-si, KR;
Hongjae Lee, Yongin-si, KR;
Kyusang Kim, Hwaseong-si, KR;
Seonjeong Kim, Hwaseong-si, KR;
Heejeon MA, Yongin-si, KR;
Wonil Park, Yongin-si, KR;
Kicheon Byun, Hwaseong-si, KR;
Woojin Lee, Yongin-si, KR;
Samsung Display Co., Ltd., Yongin-si, KR;
TES Co., Ltd, Yongin-si, KR;
LTC Co., Ltd, Hwaseong-si, KR;
Abstract
A method of manufacturing a display apparatus includes forming a semiconductor layer on a substrate, forming an insulating layer on the semiconductor layer, forming a photoresist pattern on the insulating layer, forming, by etching the insulating layer, a contact hole exposing at least a portion of the semiconductor layer, and performing a primary cleaning of the insulating layer in which the contact hole is formed using a cleaning gas including a fluorine-containing gas and a hydrogen-containing gas.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile