The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2026
Filed:
Jun. 20, 2022
Ebara Corporation, Tokyo, JP;
Masaki Tomita, Tokyo, JP;
Yasuyuki Masuda, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
There is provided a method of liquid management in an anode chamber. The method comprises providing a plating tank that comprises an anode; a barrier membrane placed to come into contact with or to be brought into close contact with an upper face of the anode; a cathode chamber on an upper side and an anode chamber on a lower side parted by the barrier membrane; and an exhaust path provided to communicate with the anode chamber and configured to discharge bubbles from the anode chamber to outside of the plating tank; storing a plating solution in the anode chamber and in the cathode chamber, such that a liquid level of the plating solution in the exhaust path that is a liquid level of the plating solution in the anode chamber is lower than a liquid level of the plating solution in the cathode chamber; determining whether the liquid level of the plating solution in the exhaust path is lower than a predetermined height, based on an output of a liquid level sensor placed in the exhaust path; and supplying pure water or an electrolytic solution to the anode chamber, when it is determined that the liquid level of the plating solution in the exhaust path is lower than the predetermined height.