The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2026
Filed:
Jul. 20, 2021
Applicant:
Aixtron SE, Herzogenrath, DE;
Inventors:
Assignee:
AIXTRON SE, Herzogenrath, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/52 (2006.01); C23C 16/458 (2006.01); C23C 16/46 (2006.01);
U.S. Cl.
CPC ...
C23C 16/52 (2013.01); C23C 16/4584 (2013.01); C23C 16/46 (2013.01);
Abstract
With the aid of one or more optical sensors, substrates which are faulty or have been incorrectly inserted in a CVD reactor are identified. The one or more optical sensors sense properties of the surfaces of the substrates, for example layer thickness or temperature, before or during a treatment process of the substrates within the CVD reactor housing. The measurement values provided by the sensors can be plotted in the form of a measurement curve, and patterns are obtained from the measurement curve, each pattern corresponding to one of the substrates. The patterns are compared with each other or with a mean calculated from the patterns.