The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 10, 2026

Filed:

Nov. 10, 2020
Applicant:

Yamaha Robotics Co., Ltd., Tokyo, JP;

Inventors:

Kohei Seyama, Tokyo, JP;

Makoto Takahashi, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/68 (2006.01); H01L 21/67 (2006.01); H01L 23/00 (2006.01); H01L 21/50 (2006.01); H05K 13/08 (2006.01);
U.S. Cl.
CPC ...
H01L 21/681 (2013.01); H01L 21/67144 (2013.01); H01L 21/67259 (2013.01); H01L 24/80 (2013.01); H01L 21/50 (2013.01); H01L 21/68 (2013.01); H01L 24/74 (2013.01); H05K 13/0812 (2018.08);
Abstract

An apparatus for producing a semiconductor device comprises a stage, a bonding head, a bonding tool and a first camera that are attached to the bonding head, and a controller, the apparatus moreover being such that the controller is configured to execute for each of one or more points: a process of mounting an inspection chip on a mounting surface; a process of acquiring, as an inspection image, an image of the mounting surface after the inspection chip has been mounted thereon captured by the first camera; a process of calculating, as an area correction amount C, a correction amount for a camera offset amount Ocm on the basis of the position of the inspection chip in the inspection image; and a process of associating the calculated area correction amount C and the position of a discretionary point and then storing the associated information in a storage device.


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