The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2026
Filed:
Nov. 29, 2021
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Mans Johan Bertil Osterberg, Rijswijk, NL;
Kenichi Kanai, Palo Alto, CA (US);
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/147 (2006.01); H01J 37/05 (2006.01); H01J 37/153 (2006.01); H01J 37/24 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/1472 (2013.01); H01J 37/05 (2013.01); H01J 37/153 (2013.01); H01J 37/24 (2013.01); H01J 37/28 (2013.01); H01J 2237/1508 (2013.01);
Abstract
Apparatus and methods for directing a beam of primary electrons along a primary beam path onto a sample are disclosed. In one arrangement, a beam separator diverts away from the primary beam path a beam of secondary electrons emitted from the sample along the primary beam path. A dispersion device is upbeam from the beam separator. The dispersion device compensates for dispersion induced in the primary beam by the beam separator. One or more common power supplies drive both the beam separator and the dispersion device.