The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 10, 2026

Filed:

May. 17, 2024
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Heng-Wei Liao, Hsinchu, TW;

De-Fang Huang, Hsinchu, TW;

Kuo-Hua Wang, Hsinchu, TW;

Chih Yang Lee, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); G03F 7/16 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70716 (2013.01); G03F 7/168 (2013.01); G03F 7/7075 (2013.01); G03F 7/70875 (2013.01);
Abstract

A treatment apparatus includes a treatment device, a cover, an actuation device, a force-transmission unit, a frame unit, and a translation mechanism. The treatment device has a carrying surface. The cover is disposed on and movable relative to the carrying surface. The actuation device includes a cylinder and a piston rod that extends along a rod axis. The piston rod is driven to move relative to the cylinder along the rod axis. The force-transmission unit is coupled to move with the piston rod along the rod axis The frame unit is movable in an upright direction and is fixed to the cover so as to permit the cover to move with the frame unit. The translation mechanism couples the force-transmission unit with the frame unit so as to translate movement of the force-transmission unit in a front-rear direction into movement of the frame unit in the upright direction.


Find Patent Forward Citations

Liao, Heng-Wei. (2026). Apparatus for treating substrate (U.S. Patent No. 12572086). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12572086

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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