The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2026
Filed:
Aug. 17, 2022
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Jochen Hetzler, Aalen, DE;
CARL ZEISS SMT GMBH, Oberkochen, DE;
Abstract
A measuring device () for the interferometric shape measurement of a surface () of a test object (--) includes (i) a diffractive optical element (--) that generates a test wave () from incoming measurement radiation (), wherein the diffractive optical element radiates the test wave onto the surface of the test object, (ii) a deflection element () that is disposed upstream of the diffractive optical element in the beam path of the measurement radiation, and (iii) a holding device () that holds the deflection element and that changes a position of the deflection element () through a combination of a tilting movement and a translation movement.