The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2026
Filed:
Jun. 13, 2024
Applicants:
Kokusai Electric Corporation, Tokyo, JP;
Air Water Inc., Osaka, JP;
Inventors:
Kimihiko Nakatani, Toyama, JP;
Yoshitomo Hashimoto, Toyama, JP;
Yoshiro Hirose, Toyama, JP;
Fumio Kawasaki, Matsumoto, JP;
Yasunori Otsuka, Matsumoto, JP;
Keisuke Nagata, Matsumoto, JP;
Assignees:
KOKUSAI ELECTRIC CORPORATION, Tokyo, JP;
AIR WATER INC., Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/40 (2006.01); B01J 31/02 (2006.01); C23C 16/02 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C23C 16/401 (2013.01); B01J 31/0237 (2013.01); C23C 16/0272 (2013.01); C23C 16/45557 (2013.01);
Abstract
There is provided a technique that includes: providing a substrate including a conductive film and an insulating film on a surface of the substrate; and forming an oxide film on a surface of the insulating film, among the conductive film and the insulating film, by supplying a halogen-free precursor, an oxidizing agent, and a catalyst to the substrate under a non-plasma atmosphere.