The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 03, 2026

Filed:

Dec. 14, 2020
Applicant:

Yamaha Robotics Co., Ltd., Tokyo, JP;

Inventors:

Yuji Eguchi, Tokyo, JP;

Kohei Seyama, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67259 (2013.01); H01L 21/67132 (2013.01); H01L 21/68764 (2013.01);
Abstract

A semiconductor device manufacturing device () includes a stage (), an installing head () that has a chip holding surface () and disposes a chip () on a substrate (), a measuring mechanism () that measures a tilt angle of the chip () loaded on an installing surface () of the substrate () by the installing head () with respect to the installing surface () as a detection tilt angle Sd, a holding surface adjusting mechanism () that changes a holding surface tilt angle Sb which is a tilt angle of the chip holding surface () with respect to a loading surface (), and a controller () that calculates a correction amount C of the holding surface tilt angle Sb based on the detection tilt angle Sd and changes the holding surface tilt angle Sb by the holding surface adjusting mechanism () according to the calculated correction amount C.


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