The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 03, 2026

Filed:

May. 19, 2023
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Yan-Yu Chen, Hsinchu, TW;

Wei Tse Hsu, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/3065 (2006.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/3065 (2013.01); H01L 24/29 (2013.01); H01L 24/32 (2013.01); H01L 24/83 (2013.01); H01L 2224/29187 (2013.01); H01L 2224/32221 (2013.01); H01L 2224/83002 (2013.01); H01L 2224/83896 (2013.01); H01L 2224/83931 (2013.01); H01L 2924/1011 (2013.01); H01L 2924/1511 (2013.01); H01L 2924/15159 (2013.01);
Abstract

A method of manufacturing a semiconductor device includes reducing a thickness of a device wafer bonded to a carrier wafer, wherein the device wafer includes a device, a portion of the carrier wafer beyond the device, in a plan view, is called a non-bonding area, and a portion of the carrier wafer overlapping the device, in the plan view, is called a device area. The method further includes performing an etching process on the non-bonding area of the carrier wafer, wherein the etching process is performed completely outside the device area of the carrier wafer.


Find Patent Forward Citations

Quick Actions:

Chen, Yan-Yu. (2026). Semiconductor device and method of manufacturing (U.S. Patent No. 12568780). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12568780

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…