The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2026
Filed:
Mar. 17, 2022
Asm Ip Holding B.v., Almere, NL;
Han Ye, Phoenix, AZ (US);
Kai Zhou, Phoenix, AZ (US);
Peipei Gao, Tempe, AZ (US);
Wentao Wang, Phoenix, AZ (US);
Kishor Patil, Chandler, AZ (US);
Fan Gao, Tempe, AZ (US);
Krishnaswamy Mahadevan, Phoenix, AZ (US);
Xing Lin, Chandler, AZ (US);
Alexandros Demos, Scottsdale, AZ (US);
Yanfu Lu, Phoenix, AZ (US);
Amir Kajbafvala, Chandler, AZ (US);
ASM IP Holding B.V., Almere, NL;
Abstract
A method of operating a reactor system to provide multi-zone substrate temperature control. The method includes, with a first pyrometer, sensing a temperature of a first zone of a substrate supported in the reactor system, and, with a second pyrometer, sensing a temperature of a second zone of the substrate. The method further includes, with a controller, comparing the temperatures of the first and second zones to setpoint temperatures for the first and second zones and, in response, generating control signals to control heating of the substrate. The method also includes controlling, based on the control signals, operations of a heater assembly operating to heat the substrate.