The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 17, 2026

Filed:

Dec. 12, 2022
Applicant:

Adeia Semiconductor Technologies Llc, San Jose, CA (US);

Inventors:

Cyprian Emeka Uzoh, San Jose, CA (US);

Laura Wills Mirkarimi, Sunol, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/762 (2006.01); H01L 21/02 (2006.01); H01L 21/20 (2006.01); H01L 21/304 (2006.01); H01L 21/3205 (2006.01); H01L 21/324 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76202 (2013.01); H01L 21/02164 (2013.01); H01L 21/02274 (2013.01); H01L 21/02345 (2013.01); H01L 21/2007 (2013.01); H01L 21/304 (2013.01); H01L 21/32051 (2013.01); H01L 21/324 (2013.01); H01L 21/76898 (2013.01);
Abstract

Disclosed herein are methods for direct bonding. In some embodiments, the direct bonding method includes microwave annealing a dielectric bonding layer of a first element by exposing the dielectric bonding layer to microwave radiation and then directly bonding the dielectric bonding layer of the first element to a second element without an intervening adhesive. The bonding method also includes depositing the dielectric bonding layer on a semiconductor portion of the first element at a first temperature and microwave annealing the dielectric bonding layer at a second temperature lower than the first temperature.


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Uzoh, Cyprian. (2026). Methods for bonding semiconductor elements (U.S. Patent No. 12557615). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12557615

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