The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 17, 2026

Filed:

Mar. 21, 2022
Applicant:

United Semiconductor (Xiamen) Co., Ltd., Fujian, CN;

Inventors:

Linshan Yuan, Fujian, CN;

Yi Lu Dai, Shamen, CN;

Guang Yang, Fujian, CN;

Jinjian Ouyang, Fujian, CN;

Hang Liu, Shamen, CN;

Chin-Chun Huang, Hsinchu County, TW;

Wen Yi Tan, Fujian, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); G01R 31/28 (2006.01); H01L 23/544 (2006.01); H05K 1/02 (2006.01);
U.S. Cl.
CPC ...
H01L 22/34 (2013.01); G01R 31/2884 (2013.01); H01L 23/544 (2013.01); H05K 1/0266 (2013.01);
Abstract

The invention provides a semiconductor testkey, which includes a testkey on a substrate, the testkey includes a first resistor pattern, a second resistor pattern and a third resistor pattern arranged in a strip, the distance between the first resistor pattern and the second resistor pattern is defined as a first distance, and the distance between the second resistor pattern and the third resistor pattern is defined as a second distance, the first resistor pattern, the second resistor pattern and the third resistor pattern have the same pattern, and the second distance is larger than the first distance.


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