The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 10, 2026

Filed:

Nov. 22, 2022
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Tsung-Sheng Kang, Ballston Lake, NY (US);

Alexander Reznicek, Troy, NY (US);

Tushar Gupta, Albany, NY (US);

Sagarika Mukesh, Albany, NY (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01); H01L 21/762 (2006.01); H10D 84/01 (2025.01); H10D 84/03 (2025.01); H10D 84/85 (2025.01);
U.S. Cl.
CPC ...
H01L 23/481 (2013.01); H01L 21/76224 (2013.01); H10D 84/0186 (2025.01); H10D 84/0188 (2025.01); H10D 84/038 (2025.01); H10D 84/853 (2025.01);
Abstract

A semiconductor device is provided. The semiconductor device includes a first field effect transistor (FET) region, a second FET region and a backside signal distribution network (BSSDN). The first FET region includes a substrate, interlayer dielectric (ILD), shallow trench isolation (STI) disposed in the substrate and a contact that extends through the STI and the ILD. The second FET region includes a substrate, interlayer dielectric (ILD), shallow trench isolation (STI) disposed in the substrate and a contact that extends to the STI. The BSSDN is disposed on the ILD in the first and second regions to contact with the contact in the first FET region.


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