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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12539530 B1

PDFFull Text
Date of Patent:
Feb. 03, 2026

Filed:

Jun. 06, 2022

Throttle valve and foreline cleaning using a microwave source

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Khokan Chandra Paul, Cupertino, CA (US);

Truong Van Nguyen, Milpitas, CA (US);

Kelvin Chan, San Ramon, CA (US);

Diwakar Kedlaya, San Jose, CA (US);

Anantha K. Subramani, San Jose, CA (US);

Abdul Aziz Khaja, San Jose, CA (US);

Vijet Patil, Bangalore, IN;

Yusheng Fang, Santa Cruz, CA (US);

Liangfa Hu, Newark, CA (US);

Prashant Kumar Kulshreshtha, San Jose, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:

Kilpatrick Townsend & Stockton LLP

Primary Examiner:

Benjamin Kendall

Int. Cl.
CPC ...
B08B 7/00 (2006.01); B08B 5/00 (2006.01); B08B 9/032 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
B08B 7/0035 (2013.01); B08B 5/00 (2013.01); B08B 9/0328 (2013.01); H01J 37/32357 (2013.01); H01J 37/32449 (2013.01); H01J 37/32862 (2013.01); B08B 2209/032 (2013.01); H01J 2237/332 (2013.01); H01J 2237/334 (2013.01);
Abstract

Exemplary semiconductor processing systems may include a processing chamber defining a processing region. The systems may include a foreline coupled with the processing chamber, the foreline defining a fluid conduit. The systems may include a radical generator having an inlet and an outlet. The outlet may be fluidly coupled with the foreline. The systems may include a gas source fluidly coupled with the inlet of the radical generator. The systems may include a throttle valve coupled with the foreline downstream of the radical generator.

Find Patent Forward Citations

Paul, Khokan. (2026). Throttle valve and foreline cleaning using a microwave source (U.S. Patent No. 12539530). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12539530

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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