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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12527226 B1

PDFFull Text
Date of Patent:
Jan. 13, 2026

Filed:

Jul. 28, 2021

Laminated substrate with piezoelectric thin film, piezoelectric thin film element and method for manufacturing this element

Applicant:

Sumitomo Chemical Company, Limited, Tokyo, JP;

Inventors:

Kenji Shibata, Ibaraki, JP;

Kazutoshi Watanabe, Ibaraki, JP;

Fumimasa Horikiri, Ibaraki, JP;

Assignees:

SCIOCS COMPANY LIMITED, Baraki, JP;

SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo, JP;

Attorney:

Rankin, Hill & Clark LLP

Primary Examiner:

Emily P Pham

Assistant Examiner:

Monica undefined Mata

Int. Cl.
CPC ...
H01L 41/18 (2006.01); B41J 2/14 (2006.01); C01G 33/00 (2006.01); C23C 14/08 (2006.01); C23C 14/34 (2006.01); H01L 41/08 (2006.01); H01L 41/187 (2006.01); H01L 41/318 (2013.01); H03H 9/02 (2006.01); H10N 30/00 (2023.01); H10N 30/078 (2023.01); H10N 30/853 (2023.01); H10N 30/076 (2023.01); H10N 30/88 (2023.01);
U.S. Cl.
CPC ...
H10N 30/8542 (2023.02); B41J 2/14201 (2013.01); C01G 33/00 (2013.01); C23C 14/08 (2013.01); C23C 14/3414 (2013.01); H03H 9/02031 (2013.01); H03H 9/02574 (2013.01); H10N 30/078 (2023.02); H10N 30/704 (2024.05); H10N 30/076 (2023.02); H10N 30/883 (2023.02);
Abstract

There is provided a laminated substrate with a piezoelectric thin film, comprising: a substrate; an electrode film formed on the substrate; and a piezoelectric thin film formed on the electrode film, wherein the piezoelectric thin film is made of an alkali niobium oxide represented by a composition formula of (KNa)NbO(0<x<1), having a perovskite structure, and oriented preferentially in (001) plane direction, and contains a metallic element selected from a group consisting of Mn and Cu at a concentration of 0.2 at % or more and 0.6 at % or less.

Find Patent Forward Citations

Quick Actions:

Shibata, Kenji. (2026). Laminated substrate with piezoelectric thin film, piezoelectric thin film element and method for manufacturing this element (U.S. Patent No. 12527226). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12527226

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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