The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 13, 2026

Filed:

Apr. 21, 2023
Applicant:

Hitachi High-tech Analysis Corporation, Tokyo, JP;

Inventors:

Toshiyuki Takahara, Tokyo, JP;

Tsuneo Sato, Tokyo, JP;

Satoshi Matsubara, Tokyo, JP;

Yuta Seki, Tokyo, JP;

Kazuya Iwata, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/083 (2018.01); G01N 23/04 (2018.01); G01N 23/18 (2018.01);
U.S. Cl.
CPC ...
G01N 23/083 (2013.01); G01N 23/04 (2013.01); G01N 23/18 (2013.01); G01N 2223/33 (2013.01);
Abstract

Proposed are an X-ray inspection apparatus and a method of inspection with X-rays in which foreign objects in even a sample in which bending, sagging, or curving may occur can be inspected accurately. The X-ray inspection apparatus includes an X-ray source () which irradiates a sample with an X-ray, an X-ray detection unit () that is installed on a side opposite to the X-ray source with respect to the sample and detects the X-ray that passed through the sample, and a sample support mechanism () that supports the sample, wherein the sample is flexible and has a shape of a film, and the sample support mechanism has a support body () through which the X-ray is capable of passing and which is in close contact with and supports at least a portion of the sample, that is disposed between the X-ray source and the X-ray detection unit.


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