The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2026
Filed:
Mar. 11, 2022
Applicant:
Applied Materials, Inc., Santa Clara, CA;
Inventors:
Laksheswar Kalita, Santa Clara, CA (US);
Joseph Behnke, Santa Clara, CA (US);
David Knapp, Santa Clara, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/40 (2006.01); C23C 14/16 (2006.01); C23C 14/58 (2006.01); C23C 16/455 (2006.01); C23C 18/16 (2006.01); C23C 18/32 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45565 (2013.01); C23C 14/165 (2013.01); C23C 14/5853 (2013.01); C23C 16/40 (2013.01); C23C 18/1689 (2013.01); C23C 18/32 (2013.01);
Abstract
Described herein is a chamber component including a metal layer comprising nickel and a barrier layer of nickel oxide over the metal layer. The barrier layer of nickel oxide may be formed by ozone treating the chamber component with air, nitrogen or argon O, Oat a temperature from about 25° C. to about 350° C.