The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2026
Filed:
Mar. 19, 2024
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventor:
Michael Patra, Oberkochen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01D 5/28 (2006.01); G01D 5/26 (2006.01); G02B 26/00 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G01D 5/285 (2013.01); G01D 5/266 (2013.01); G02B 26/001 (2013.01); G03F 7/70141 (2013.01); G03F 7/7015 (2013.01); G03F 7/702 (2013.01); G03F 7/70233 (2013.01); G03F 7/70258 (2013.01); G03F 7/70316 (2013.01); G03F 7/70325 (2013.01); G03F 7/70408 (2013.01); G03F 7/70508 (2013.01); G03F 7/70516 (2013.01); G03F 7/70525 (2013.01);
Abstract
A method for determining a position of a mirror of an optical system comprises: a) providing at least one parameter from a mechanical model of the mirror; b) interferometrically detecting a temporal change in a distance of a point of a curved mirror effective surface; and c) ascertaining an amplitude and a phase of N eigenmodes from the temporal change in the distance and the at least one parameter to determine the position of the mirror.