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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12511862 B1

PDFFull Text
Date of Patent:
Dec. 30, 2025

Filed:

Jan. 10, 2022

Template-based image processing for target segmentation and metrology

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Xinhuo Xiao, Hangzhou, CN;

Stephanie W. Chen, Fremont, CA (US);

Waheb Bishara, San Mateo, CA (US);

Bin Lin, Hangzhou, CN;

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:

Lowenstein Sandler LLP

Primary Examiner:

Akwasi M Sarpong

Assistant Examiner:

Pawan undefined Dhingra

Int. Cl.
CPC ...
G06V 10/26 (2022.01); G01N 21/95 (2006.01); G06T 7/00 (2017.01); G06T 7/11 (2017.01); G06T 7/60 (2017.01); G06V 10/762 (2022.01); G06V 10/764 (2022.01);
U.S. Cl.
CPC ...
G06V 10/26 (2022.01); G01N 21/9501 (2013.01); G06T 7/001 (2013.01); G06T 7/11 (2017.01); G06T 7/60 (2013.01); G06V 10/762 (2022.01); G06V 10/764 (2022.01); G06T 2200/24 (2013.01); G06T 2207/20021 (2013.01); G06T 2207/20132 (2013.01); G06T 2207/30148 (2013.01);
Abstract

One or more images of a portion of a wafer with fabricated devices are acquired using an imaging tool. A pattern of repeating features in an input image of a wafer is identified using various methods, such as correlation and clustering of neighboring vectors. A template is generated based on the found pattern of repeating features. The template is aligned with the acquired image to identify target locations. The target locations are then isolated from the original image for performing detailed metrology.

Find Patent Forward Citations

Xiao, Xinhuo. (2025). Template-based image processing for target segmentation and metrology (U.S. Patent No. 12511862). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12511862

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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