The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 2025
Filed:
Oct. 27, 2022
Tokyo Electron Limited, Tokyo, JP;
H. Jim Fulford, Albany, NY (US);
Mark I. Gardner, Albany, NY (US);
Tokyo Electron Limited, Tokyo, JP;
Abstract
A semiconductor structure includes semiconductor layers stacked vertically over a substrate. The structure includes a gate structure interleaved with the semiconductor layers, where the gate structure wraps around a first end portion of each semiconductor layer. The structure includes dielectric layers stacked vertically over the substrate and interleaved with the semiconductor layers, where a first end portion of each dielectric layer is aligned with a second end portion of each semiconductor layer, which is laterally opposite to the first end portion of each semiconductor layer. The structure includes a metal contact extending vertically to contact the second end portion of each semiconductor layer.