The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 2025
Filed:
Oct. 31, 2022
Yangtze Memory Technologies Co., Ltd., Wuhan, CN;
Kun Zhang, Wuhan, CN;
YANGTZE MEMORY TECHNOLOGIES CO., LTD., Wuhan, CN;
Abstract
A method of fabricating a three-dimensional (3D) memory device includes forming a stack structure on a substrate, forming a channel structure, a dummy channel structure, and a gate line slit structure penetrating through the stack structure and extending into the substrate, removing the substrate to expose a first side of the stack structure, forming a protective layer covering an exposed portion of the channel structure on the first side of the stack structure, removing at least the exposed portion of the channel structure, and removing the protective layer after removing at least the exposed portion of the channel structure.