The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 2025
Filed:
Jan. 11, 2024
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Ilseok Son, Albany, NY (US);
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); G01B 11/26 (2006.01); G01B 11/27 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 22/12 (2013.01); G01B 11/272 (2013.01);
Abstract
A method for overlay measurement is disclosed. The method includes receiving an image of a bonded wafer. The method includes generating, based on the image, a profile of the bonded wafer. The method includes adjusting, using the profile, an objective lens of a single-focus image-based infrared (IR) system to perform an overlay measurement of the bonded wafer.