The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 2025
Filed:
May. 17, 2023
Applicant:
Advanced Energy Industries, Inc., Denver, CO (US);
Inventors:
Daniel Carter, Fort Collins, CO (US);
Randy Heckman, Fort Collins, CO (US);
Victor Brouk, Fort Collins, CO (US);
Daniel J. Hoffman, Fort Collins, CO (US);
Assignee:
Advanced Energy Industries, Inc., Denver, CO (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 14/34 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32009 (2013.01); C23C 14/345 (2013.01); H01J 37/32091 (2013.01); H01J 37/32137 (2013.01); H01J 37/32146 (2013.01); H01J 37/32174 (2013.01); H01J 37/32935 (2013.01); H01J 37/3299 (2013.01);
Abstract
An apparatus and method to produce a waveform. The apparatus includes a first node, at least one switch that couples a second node to the first node, and responsive to the at least one switch being closed, a peak voltage is produced at the first node before a voltage at the first node drops by a voltage step. A power supply is coupled to the first node to produce, after the voltage step, a ramped voltage at the first node.