The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 2025
Filed:
Jul. 13, 2022
Applicant:
Kctech Co., Ltd., Gyeonggi-do, KR;
Inventors:
Assignee:
KCTECH CO., LTD., Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/321 (2006.01); C01F 17/235 (2020.01); C09G 1/02 (2006.01); C09K 3/14 (2006.01); H01L 21/3105 (2006.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01); C01F 17/235 (2020.01); H01L 21/3212 (2013.01); C01P 2004/03 (2013.01); C01P 2004/04 (2013.01); C01P 2004/32 (2013.01); C01P 2004/50 (2013.01); C01P 2004/64 (2013.01); C01P 2006/10 (2013.01); C01P 2006/11 (2013.01); C01P 2006/12 (2013.01); C01P 2006/80 (2013.01); C09K 3/1409 (2013.01); C09K 3/1463 (2013.01); H01L 21/31053 (2013.01);
Abstract
Provided is a cerium-based particle and a polishing slurry composition including the same. The cerium-based particle may include a self-assembly of fine particles and an organic material. The cerium-based particle is a spherical ceria powder connected by a crystalline network formed by a self-assembly of a fine particle. The cerium-based particle is a heat-treated self-assembly of fine particles. The moisture content of the self-assembly of the fine particles is 2% or less, and the temperature of the heat treating is in the range of 500° C. to 600° C.